An Experimental and Numerical Study of the Humidity Effect on the Stability of a Capacitive Ceramic Pressure Sensor
نویسندگان
چکیده
The effect of the humidity of the surrounding atmosphere on the characteristics of capacitive structures is a known problem for capacitive gas-pressure sensors. However, the use of a differential mode of operation can provide a good solution – only the manufacturing of the ceramic structures with the appropriate pairs of capacitive sensing elements remains a major challenge. In order to find a compromise solution, the effect of the humid atmosphere and the moisture on the exterior of an LTCCbased capacitive pressure sensor was inspected closely through experimental and numerical analyses of various situations.
منابع مشابه
The Effect of Humidity on the Stability of Ltcc Pressure Sensors
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